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ID Author(s) Title Publisher Year Pages Language Size Extension GET
1679480 Prem Pal, Kazuo Sato Silicon wet bulk micromachining for mems [1 ed.]
981461372X, 978-981-4613-72-9, 9789814613736, 9814613738, 978-1-315-36492-6
Pan Stanford Pub 2016 424 English 14 Mb pdf GET

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